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UBC Theses and Dissertations
Fabricating silicon mesh bolometers for BAM Chen, Karen
Abstract
Silicon membranes have been fabricated and etched into mesh structures using both wet and Cl₂ plasma etching. The most repeatable process involoved wet etching triple bonded wafers with a buried oxide layer. A recipe to build Si meshes, with a grid spacing of 375 μm and leg cross-sections of 5 μm by 30 μm, from 5 μm thick membranes is described. The meshes are supported by 4 legs that are each 30 μm wide and 1 mm long. Also, the resistivity of thin gold films was measured for temperatures ranging from 4.2 K to 300 K. It was found that the ideal thickness, that leads to a sheet resistance of at 300 mK for of 5μm by 385μm gold lines, was 150 Å. A bolometer building process that incorporates the gold evaporations with the mesh building procedure is given, although preliminary attempts to produce bolometers have been unsuccessful.
Item Metadata
Title |
Fabricating silicon mesh bolometers for BAM
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Creator | |
Publisher |
University of British Columbia
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Date Issued |
2000
|
Description |
Silicon membranes have been fabricated and etched into mesh structures using both
wet and Cl₂ plasma etching. The most repeatable process involoved wet etching triple
bonded wafers with a buried oxide layer. A recipe to build Si meshes, with a grid
spacing of 375 μm and leg cross-sections of 5 μm by 30 μm, from 5 μm thick membranes
is described. The meshes are supported by 4 legs that are each 30 μm wide and 1 mm
long. Also, the resistivity of thin gold films was measured for temperatures ranging from
4.2 K to 300 K. It was found that the ideal thickness, that leads to a sheet resistance of
at 300 mK for of 5μm by 385μm gold lines, was 150 Å. A bolometer building
process that incorporates the gold evaporations with the mesh building procedure is
given, although preliminary attempts to produce bolometers have been unsuccessful.
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Extent |
3831765 bytes
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Genre | |
Type | |
File Format |
application/pdf
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Language |
eng
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Date Available |
2009-07-06
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Provider |
Vancouver : University of British Columbia Library
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Rights |
For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.
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DOI |
10.14288/1.0085169
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URI | |
Degree | |
Program | |
Affiliation | |
Degree Grantor |
University of British Columbia
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Graduation Date |
2000-05
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Campus | |
Scholarly Level |
Graduate
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Aggregated Source Repository |
DSpace
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Item Media
Item Citations and Data
Rights
For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use.