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Temperature and dislocation stress field models of the LEC growth of gallium arsenide

University of British Columbia

The temperature fields and resulting stress fields have been calculated for a growing GaAs crystal produced by the LEC process. The calculations are based in a finite element numerical thermoelastic stress analysis. The calculated temperature fields have been compared to reported experimental measurements with good agreement. The stress fields have been used to calculate the resolved shear stresses, in the growing crystal, from which the dislocation density and distribution were determined. Using the model the effects of a range of growth and environmental parameters on the dislocation density and distribution were determined. Theses parameters include crystal length, crystal diameter, cone taper, boron oxide thickness, gas pressure, solid/liquid interface shape, vertical temperature gradients and others. The results show that the temperature distribution in the gas surrounding the crystal, and the boron oxide thickness, were critical factors in determining the dislocation density and distribution in the crystal. The crystal radius, crystal length and interface curvature also strongly influenced the dislocation configuration. After crystal growth, the dislocation density at the end of the crystal was strongly influenced by the cooling procedure adopted. The dislocation distribution on cross-sections of the crystal exhibited two-fold, four-fold and eight-fold symmetry depending on growth and cooling conditions and position in the crystal.

Text

2010-08-18

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http://hdl.handle.net/2429/27525

Mining Engineering

University of British Columbia

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