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Design and modeling of a high accuracy three degrees of freedom MEMS manipulator

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Title: Design and modeling of a high accuracy three degrees of freedom MEMS manipulator
Author: Venugopal, Shyam; Hsu, Lun-Chen; Rao, Smitha M. N.; Wang, B. P.; Chiao, Mu; Chiao, J.-C.
Subject Keywords Manipulators, MEMS, calibration techniques
Issue Date: 2005
Publicly Available in cIRcle 2011-11-09
Publisher Society of Photo-Optical Instrumentation Engineers
Citation: Shyam Venugopal, Lun-Chen Hsu, Smitha Malalur-Nagaraja-Rao, B. P. Wang, Mu Chiao and J.-C. Chiao, "Design and modeling of a high accuracy three degrees of freedom MEMS manipulator", Proc. SPIE 6037, 60371Y (2005); doi:10.1117/12.639904
Abstract: A new design for a high accuracy, 3-degree of freedom (DOF) MEMS manipulator is proposed. The 3-DOF robotic manipulator is to be used for biomedical applications such as cell probing, tissue sampling, neuron signal reading and drug delivery, in which high accuracy and repeatability of positioning is required. While sensing or imaging elements are not available in the integration with the manipulator to provide feedback for positioning, we investigated a calibration approach to minimize the positioning errors. In-plane and vertical MEMS thermal actuators are chosen to perform the required tasks. The modeling of the thermal actuators was first studied and the results match with experimental results. A calibration algorithm is implemented to allow the minimization of accumulated motion errors. The algorithm was successfully applied to the manipulator and results were obtained. A MATLAB script was written to simplify the calibration procedure. Problems faced in the design and potential solutions will be also discussed. Copyright 2005 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Affiliation: Mechanical Engineering, Dept of
URI: http://hdl.handle.net/2429/38902
Peer Review Status: Reviewed
Scholarly Level: Faculty

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