Open Collections

UBC Faculty Research and Publications

Design and modeling of a high accuracy three degrees of freedom MEMS manipulator Venugopal, Shyam; Hsu, Lun-Chen; Rao, Smitha M. N.; Wang, B. P.; Chiao, Mu; Chiao, J.-C.

Abstract

A new design for a high accuracy, 3-degree of freedom (DOF) MEMS manipulator is proposed. The 3-DOF robotic manipulator is to be used for biomedical applications such as cell probing, tissue sampling, neuron signal reading and drug delivery, in which high accuracy and repeatability of positioning is required. While sensing or imaging elements are not available in the integration with the manipulator to provide feedback for positioning, we investigated a calibration approach to minimize the positioning errors. In-plane and vertical MEMS thermal actuators are chosen to perform the required tasks. The modeling of the thermal actuators was first studied and the results match with experimental results. A calibration algorithm is implemented to allow the minimization of accumulated motion errors. The algorithm was successfully applied to the manipulator and results were obtained. A MATLAB script was written to simplify the calibration procedure. Problems faced in the design and potential solutions will be also discussed. Copyright 2005 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

Item Metadata

Title
Design and modeling of a high accuracy three degrees of freedom MEMS manipulator
Creator
Venugopal, Shyam; Hsu, Lun-Chen; Rao, Smitha M. N.; Wang, B. P.; Chiao, Mu; Chiao, J.-C.
Publisher
Society of Photo-Optical Instrumentation Engineers
Date Issued
2005
Description
A new design for a high accuracy, 3-degree of freedom (DOF) MEMS manipulator is proposed. The 3-DOF robotic manipulator is to be used for biomedical applications such as cell probing, tissue sampling, neuron signal reading and drug delivery, in which high accuracy and repeatability of positioning is required. While sensing or imaging elements are not available in the integration with the manipulator to provide feedback for positioning, we investigated a calibration approach to minimize the positioning errors. In-plane and vertical MEMS thermal actuators are chosen to perform the required tasks. The modeling of the thermal actuators was first studied and the results match with experimental results. A calibration algorithm is implemented to allow the minimization of accumulated motion errors. The algorithm was successfully applied to the manipulator and results were obtained. A MATLAB script was written to simplify the calibration procedure. Problems faced in the design and potential solutions will be also discussed. Copyright 2005 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Subject
Manipulators; MEMS; calibration techniques
Genre
Conference Paper
Type
Text
Language
eng
Date Available
2011-11-09
Provider
Vancouver : University of British Columbia Library
Rights
Attribution-NonCommercial-NoDerivatives 4.0 International
DOI
10.14288/1.0080665
URI
http://hdl.handle.net/2429/38902
Affiliation
Applied Science, Faculty of; Mechanical Engineering, Department of
Citation
Shyam Venugopal, Lun-Chen Hsu, Smitha Malalur-Nagaraja-Rao, B. P. Wang, Mu Chiao and J.-C. Chiao, "Design and modeling of a high accuracy three degrees of freedom MEMS manipulator", Proc. SPIE 6037, 60371Y (2005)
Publisher DOI
10.1117/12.639904
Peer Review Status
Reviewed
Scholarly Level
Faculty
Rights URI
http://creativecommons.org/licenses/by-nc-nd/4.0/
Aggregated Source Repository
DSpace

Item Media

Item Citations and Data

Rights

Attribution-NonCommercial-NoDerivatives 4.0 International