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Fabrication techniques and RF performances of transmission lines on polymer substrates

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Title: Fabrication techniques and RF performances of transmission lines on polymer substrates
Author: Wang, Jianqun; Cai, Ying; Ativanichayaphong, Thermpon; Chiao, Mu; Chiao, J.-C.
Subject Keywords Polymer, RF MEMS, Benzocyclobutene, Polyimide, Kapton, Coplanar Waveguide
Issue Date: 2005
Publicly Available in cIRcle 2011-11-09
Publisher Society of Photo-Optical Instrumentation Engineers
Citation: Jianqun Wang, Ying Cai, Thermpon Ativanichayaphong, Mu Chiao and J.-C. Chiao, "Fabrication techniques and RF performances of transmission lines on polymer substrates", Proc. SPIE 6035, 60351M (2005); doi:10.1117/12.637975
Abstract: The advantages of polymers have made them popular choices in many micro device applications. The benefits of low material and fabrication costs have been demonstrated in many micro-fluidic devices. The low conductivities and low dielectric constants of polymers provide potentials for high quality-factor RF MEMS applications. Nevertheless, the extension of using polymers for electronic components has not been well explored. In this work, we investigated the fabrication processes and RF performances of coplanar waveguide (CPW) transmission lines, with which many RF MEMS phase shifters, tuners, switches and interconnects are built, on polymer dielectric layers. In order to achieve optimum results, the CPW transmission lines were fabricated on benzocyclobutene (BCB), kapton and polyimide polymers. Our experimental results indicated very low insertion losses of CPW transmission lines with BCB as a dielectric layer and with kapton as substrate, and a moderate insertion loss with polyimide as a dielectric layer. Copyright 2005 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of this paper are prohibited.
Affiliation: Mechanical Engineering, Dept of
URI: http://hdl.handle.net/2429/38909
Peer Review Status: Reviewed
Scholarly Level: Faculty

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