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An optical scanner based on cantilever-type electrostatic zipping actuators

Society of Photo-Optical Instrumentation Engineers

This paper discusses modeling, design, fabrication and characterization of an optical scanner based on cantilever-type electrostatic zipping actuators. The electrostatic actuator has been designed to achieve high displacements for large optical scanning angles at lower actuation voltages. The zipping actuators are fabricated using multi-layer polysilicon foundry fabrication processes. The electrostatic force between the cantilever and the bottom electrode on the substrate pulls the cantilever down. With a warped cantilever, the force closes the gap from the anchored end and gradually the zipping effect actuates the entire cantilever. In our design, mechanical structures are arranged to avoid electrical shortcircuit. With various annealing temperatures, the warped angles are controllable. The cantilever serves as a reflective surface and the high out-of-plane displacement is used to steer a reflected laser beam for imaging and scanning applications. In this paper we present the design considerations in electrostatic zipping actuator displacement and control as well as the arrangement for optical scanning. Copyright 2007 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

Conference Paper

eng

Vancouver : University of British Columbia Library

10.14288/1.0080676

Applied Science, Faculty of; Mechanical Engineering, Department of

10.1117/12.767801

Faculty

DSpace