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New developments on polymer-based MEMS phase shifters

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Title: New developments on polymer-based MEMS phase shifters
Author: Wang, Jianqun; Ativanichayaphong, Thermpon; Cai, Ying; Huang, Wen-Ding; Chiao, Mu; Chiao, J.-C.
Issue Date: 2007
Publicly Available in cIRcle 2011-11-09
Publisher Society of Photo-Optical Instrumentation Engineers
Citation: Jianqun Wang, Thermpon Ativanichayaphong, Ying Cai, Wen-Ding Huang, Mu Chiao and J.-C. Chiao, "New developments on polymer-based MEMS phase shifters", Proc. SPIE 6836, 68360I (2007); doi:10.1117/12.754991
Abstract: Phase shifter is one of the core components for phased-array antennas which find wide applications in satellite systems, telecommunications, wireless systems, radar systems and tracking systems. The current high-frequency phase shifters are mainly built upon active semiconductor technologies which suffer from high fabrication and assembly costs. In this work, we propose a cost-effective approach to fabricate distributed MEMS transmission line phase shifters on a polymer-glass substrate. The fabrication procedure is compatible with CMOS and post-CMOS processes. The polymerglass phase shifter was characterized from DC to 26 GHz. The measurements show a phase shift of 120° and a 2.5-dB insertion loss at 26 GHz. Copyright 2007 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Affiliation: Applied Science, Faculty ofMechanical Engineering, Department of
URI: http://hdl.handle.net/2429/38911
Peer Review Status: Reviewed
Scholarly Level: Faculty

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