UBC Faculty Research and Publications

New developments on polymer-based MEMS phase shifters Wang, Jianqun; Ativanichayaphong, Thermpon; Cai, Ying; Huang, Wen-Ding; Chiao, Mu; Chiao, J.-C.

Abstract

Phase shifter is one of the core components for phased-array antennas which find wide applications in satellite systems, telecommunications, wireless systems, radar systems and tracking systems. The current high-frequency phase shifters are mainly built upon active semiconductor technologies which suffer from high fabrication and assembly costs. In this work, we propose a cost-effective approach to fabricate distributed MEMS transmission line phase shifters on a polymer-glass substrate. The fabrication procedure is compatible with CMOS and post-CMOS processes. The polymerglass phase shifter was characterized from DC to 26 GHz. The measurements show a phase shift of 120° and a 2.5-dB insertion loss at 26 GHz. Copyright 2007 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

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Attribution-NonCommercial-NoDerivatives 4.0 International