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Development of an IrOx micro pH sensor array on flexible polymer substrate Huang, Wen-Ding; Wang, Jianqun; Ativanichayaphong, Thermpon; Chiao, Mu; Chiao, J. C.

Abstract

pH sensor is an essential component used in many chemical, food, and bio-material industries. Conventional glass electrodes have been used to construct pH sensors, however, have some disadvantages in specific applications. It is difficult to use glass electrodes for in vivo biomedical or food monitoring applications due to size limitation and no deformability. In this paper, we present design and fabrication processes of a miniature iridium oxide thin film pH sensor array on flexible polymer substrates. The amorphous iridium oxide thin film was used as the sensing material. A sol-gel dip-coating process of iridium oxide film was demonstrated in this paper. A super-Nernstian response has been measured on individual sensors of the array with a slope of -71.6±3 mV/pH at 25°C within the pH range between 2.83 and 11.04. Copyright 2008 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

Item Metadata

Title
Development of an IrOx micro pH sensor array on flexible polymer substrate
Creator
Huang, Wen-Ding; Wang, Jianqun; Ativanichayaphong, Thermpon; Chiao, Mu; Chiao, J. C.
Publisher
Society of Photo-Optical Instrumentation Engineers
Date Issued
2008
Description
pH sensor is an essential component used in many chemical, food, and bio-material industries. Conventional glass electrodes have been used to construct pH sensors, however, have some disadvantages in specific applications. It is difficult to use glass electrodes for in vivo biomedical or food monitoring applications due to size limitation and no deformability. In this paper, we present design and fabrication processes of a miniature iridium oxide thin film pH sensor array on flexible polymer substrates. The amorphous iridium oxide thin film was used as the sensing material. A sol-gel dip-coating process of iridium oxide film was demonstrated in this paper. A super-Nernstian response has been measured on individual sensors of the array with a slope of -71.6±3 mV/pH at 25°C within the pH range between 2.83 and 11.04. Copyright 2008 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Subject
miniature pH sensor array; flexible polymer substrate; sol-gel process; electro-plating process; smart litmus paper
Genre
Conference Paper
Type
Text
Language
eng
Date Available
2011-11-09
Provider
Vancouver : University of British Columbia Library
Rights
Attribution-NonCommercial-NoDerivatives 4.0 International
DOI
10.14288/1.0080675
URI
http://hdl.handle.net/2429/38912
Affiliation
Applied Science, Faculty of; Mechanical Engineering, Department of
Citation
Wen-Ding Huang, Jianqun Wang, Thermpon Ativanichayaphong, Mu Chiao and J. C. Chiao, "Development of an IrOx micro pH sensor array on flexible polymer substrate", Proc. SPIE 6931, 693104 (2008);
Publisher DOI
1117/12.775856
Peer Review Status
Reviewed
Scholarly Level
Faculty
Rights URI
http://creativecommons.org/licenses/by-nc-nd/4.0/
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Attribution-NonCommercial-NoDerivatives 4.0 International