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Development of an IrOx micro pH sensor array on flexible polymer substrate

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Title: Development of an IrOx micro pH sensor array on flexible polymer substrate
Author: Huang, Wen-Ding; Wang, Jianqun; Ativanichayaphong, Thermpon; Chiao, Mu; Chiao, J. C.
Subject Keywords miniature pH sensor array, flexible polymer substrate, sol-gel process, electro-plating process, smart litmus paper
Issue Date: 2008
Publicly Available in cIRcle 2011-11-09
Publisher Society of Photo-Optical Instrumentation Engineers
Citation: Wen-Ding Huang, Jianqun Wang, Thermpon Ativanichayaphong, Mu Chiao and J. C. Chiao, "Development of an IrOx micro pH sensor array on flexible polymer substrate", Proc. SPIE 6931, 693104 (2008); doi:10.1117/12.775856
Abstract: pH sensor is an essential component used in many chemical, food, and bio-material industries. Conventional glass electrodes have been used to construct pH sensors, however, have some disadvantages in specific applications. It is difficult to use glass electrodes for in vivo biomedical or food monitoring applications due to size limitation and no deformability. In this paper, we present design and fabrication processes of a miniature iridium oxide thin film pH sensor array on flexible polymer substrates. The amorphous iridium oxide thin film was used as the sensing material. A sol-gel dip-coating process of iridium oxide film was demonstrated in this paper. A super-Nernstian response has been measured on individual sensors of the array with a slope of -71.6±3 mV/pH at 25°C within the pH range between 2.83 and 11.04. Copyright 2008 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Affiliation: Mechanical Engineering, Dept of
URI: http://hdl.handle.net/2429/38912
Peer Review Status: Reviewed
Scholarly Level: Faculty

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