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Fabrication processes of MEMS phase shifters on polymer-based substrates Wang, Jianqun; Ativanichayaphong, Thermpon; Cai, Ying; Huang, Wen-Ding; Hsu, Lun-Chen; Davis, W. Alan; Chiao, Mu; Chiao, J.-C.
Abstract
RF phase shifters find wide applications in telecommunications, satellite systems, personal wireless communication systems, radar systems, tracking systems, and sensors. They have been conventionally manufactured by semiconductor technologies which suffer from high insertion losses due to high RF series resistances. They are expensive due to fabrication and assembly costs. The RF MEMS phase shifters provide low insertion losses, low fabrication costs and high linearity compared with the semiconductor ones. Furthermore, polymer materials have demonstrated low material costs and low RF attenuations. In this work, we proposed to build RF MEMS phase shifters on polymer substrates. The proposed devices were successfully manufactured and tested from DC to 26 GHz. Our experimental results indicated more than 35 degrees phase shifts and low insertion losses. Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Item Metadata
Title |
Fabrication processes of MEMS phase shifters on polymer-based substrates
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Creator | |
Publisher |
Society of Photo-Optical Instrumentation Engineers
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Date Issued |
2006
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Description |
RF phase shifters find wide applications in telecommunications, satellite systems, personal wireless communication systems, radar systems, tracking systems, and sensors. They have been conventionally manufactured by semiconductor technologies which suffer from high insertion losses due to high RF series resistances. They are expensive due to fabrication and assembly costs. The RF MEMS phase shifters provide low insertion losses, low fabrication costs and high linearity compared with the semiconductor ones. Furthermore, polymer materials have demonstrated low material costs and low RF attenuations. In this work, we proposed to build RF MEMS phase shifters on polymer substrates. The proposed devices were successfully manufactured and tested from DC to 26 GHz. Our experimental results indicated more than 35 degrees phase shifts and low insertion losses. Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
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Genre | |
Type | |
Language |
eng
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Date Available |
2011-11-09
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Provider |
Vancouver : University of British Columbia Library
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Rights |
Attribution-NonCommercial-NoDerivatives 4.0 International
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DOI |
10.14288/1.0080677
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URI | |
Affiliation | |
Citation |
Jianqun Wang, Thermpon Ativanichayaphong, Ying Cai, Wen-Ding Huang, Lun-Chen Hsu, W. Alan Davis, Mu Chiao and J.-C. Chiao, "Fabrication processes of MEMS phase shifters on polymer-based substrates", Proc. SPIE 6415, 641515 (2006)
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Publisher DOI |
10.1117/12.695577
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Peer Review Status |
Reviewed
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Scholarly Level |
Faculty
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Rights URI | |
Aggregated Source Repository |
DSpace
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Item Citations and Data
Rights
Attribution-NonCommercial-NoDerivatives 4.0 International