UBC Faculty Research and Publications

Piezoresistive strain sensing using carbon nanotube forests suspended by Parylene-C membranes Bsoul, Anas Amjad Mohammad; Mohamed Ali, Mohamed Sultan; Nojeh, Alireza; Takahata, Kenichi

Abstract

We present a strain gauge that uses a carbon nanotube (CNT) forest, partially embedded in a Parylene-C membrane, as a piezoresistor. The device exhibits high sensitivity with a gauge factor of 4.52 or higher for strains up to 1.5%, offering much higher sensitivity in the strain range than those reported for other types of CNT-forest/polymer composite piezoresistors. The gauge also shows a linear response to bending strains generated by forces applied perpendicularly to the membrane with a 55-ppm/mN sensitivity. These findings suggest promising characteristics for a variety of sensing applications of the CNT-forest/Parylene film.

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Attribution-NonCommercial-NoDerivatives 4.0 International