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Piezoresistive strain sensing using carbon nanotube forests suspended by Parylene-C membranes Bsoul, Anas Amjad Mohammad; Mohamed Ali, Mohamed Sultan; Nojeh, Alireza; Takahata, Kenichi
Abstract
We present a strain gauge that uses a carbon nanotube (CNT) forest, partially embedded in a Parylene-C membrane, as a piezoresistor. The device exhibits high sensitivity with a gauge factor of 4.52 or higher for strains up to 1.5%, offering much higher sensitivity in the strain range than those reported for other types of CNT-forest/polymer composite piezoresistors. The gauge also shows a linear response to bending strains generated by forces applied perpendicularly to the membrane with a 55-ppm/mN sensitivity. These findings suggest promising characteristics for a variety of sensing applications of the CNT-forest/Parylene film.
Item Metadata
Title |
Piezoresistive strain sensing using carbon nanotube forests suspended by Parylene-C membranes
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Creator | |
Date Issued |
2012
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Description |
We present a strain gauge that uses a carbon nanotube (CNT) forest, partially embedded in a
Parylene-C membrane, as a piezoresistor. The device exhibits high sensitivity with a gauge factor
of 4.52 or higher for strains up to 1.5%, offering much higher sensitivity in the strain range than
those reported for other types of CNT-forest/polymer composite piezoresistors. The gauge also
shows a linear response to bending strains generated by forces applied perpendicularly to the
membrane with a 55-ppm/mN sensitivity. These findings suggest promising characteristics for a
variety of sensing applications of the CNT-forest/Parylene film.
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Genre | |
Type | |
Language |
eng
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Date Available |
2013-05-18
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Provider |
Vancouver : University of British Columbia Library
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Rights |
Attribution-NonCommercial-NoDerivatives 4.0 International
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DOI |
10.14288/1.0070777
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URI | |
Affiliation | |
Citation |
Applied Physics Letters vol. 100, pp. 213510-1-213510-3(2012)
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Publisher DOI |
10.1063/1.4721460
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Peer Review Status |
Reviewed
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Scholarly Level |
Faculty
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Rights URI | |
Aggregated Source Repository |
DSpace
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Item Citations and Data
Rights
Attribution-NonCommercial-NoDerivatives 4.0 International