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Field-emission-assisted approach to dry micro-electro-discharge machining of carbon-nanotube forests Saleh, Tanveer; Dahmardeh, Masoud; Bsoul, Anas Amjad Mohammad; Nojeh, Alireza
Abstract
This work investigates dry micro-electro-discharge machining (lEDM) of vertically aligned carbon nanotube (CNT) forests that are used as cathodes in the process, as opposed to conventional lEDM where the material to be machined forms the anode, toward achieving higher precision in the patterned microstructures. The new configuration with the reversed polarity is observed to generate higher discharge currents in the process, presumably due to effective field-emission from CNTs. This effect allows the process to be performed at very low discharge energies, approximately 80 smaller than in the conventional normal-polarity case, with the machining voltage and tolerance down to 10V and 2.5 lm, respectively, enabling high-precision high-aspect-ratio micropatterning in the forests. The new approach is also demonstrated to make the process faster, cleaner, and more stable than conventional processing. Spectroscopic analyses of the forests processed by reverse lEDM show no evidence of significant crystalline deterioration or contamination in the CNTs.
Item Metadata
Title |
Field-emission-assisted approach to dry micro-electro-discharge machining of carbon-nanotube forests
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Creator | |
Date Issued |
2011
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Description |
This work investigates dry micro-electro-discharge machining (lEDM) of vertically aligned carbon
nanotube (CNT) forests that are used as cathodes in the process, as opposed to conventional lEDM
where the material to be machined forms the anode, toward achieving higher precision in the
patterned microstructures. The new configuration with the reversed polarity is observed to generate
higher discharge currents in the process, presumably due to effective field-emission from CNTs. This
effect allows the process to be performed at very low discharge energies, approximately 80 smaller
than in the conventional normal-polarity case, with the machining voltage and tolerance down to
10V and 2.5 lm, respectively, enabling high-precision high-aspect-ratio micropatterning in the
forests. The new approach is also demonstrated to make the process faster, cleaner, and more stable
than conventional processing. Spectroscopic analyses of the forests processed by reverse lEDM
show no evidence of significant crystalline deterioration or contamination in the CNTs.
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Genre | |
Type | |
Language |
eng
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Date Available |
2013-05-18
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Provider |
Vancouver : University of British Columbia Library
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Rights |
Attribution-NonCommercial-NoDerivatives 4.0 International
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DOI |
10.14288/1.0070779
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URI | |
Affiliation | |
Citation |
Journal of Applied Physics vol. 110, pp.103305-1 - 103305-7 (2011);
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Publisher DOI |
10.1063/1.3663438
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Peer Review Status |
Reviewed
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Scholarly Level |
Faculty
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Rights URI | |
Aggregated Source Repository |
DSpace
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Item Media
Item Citations and Data
Rights
Attribution-NonCommercial-NoDerivatives 4.0 International